Analysis and optimisation of MEMS electrostatic on-chip power supply for self-powering of slow-moving sensors

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Title: Analysis and optimisation of MEMS electrostatic on-chip power supply for self-powering of slow-moving sensors
Author(s): Mitcheson,P.D.
Stark,B.H.
Miao,P.
Yeatman,E.M.
Holmes,A.S.
Green,T.C.
Item Type: Conference Paper
Content Version: Accepted version
Publication Date: Sep-2003
URI: http://hdl.handle.net/10044/1/4236
Publisher Link: http://www.eurosensors.net/
Publisher: University of Minho
Presented At: Eurosensors 03, 17th European conference on sensors and actuators, University of Minho Guimaraes, Portugal, 21 - 24 September 2003
Start Page: 48
End Page: 51
Copyright Statement: © 2003 the authors.
Place of Publication: Guimaraes
Appears in Collections:Control and Power



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